Lam Research Model 4520 200MM Oxide Etcher, CE Marked Start Price USD 142,000.00 Current Price USD 142,000.00 Time Left - Bid Count 0 Buy It Now Price - Reserve Price - Start Time Saturday, October 04, 2008 End Time Monday, November 03, 2008 Location Temple, TX See more about 'Lam Research Model 4520 200MM Oxide Etcher, CE Marked' Description Lam Research Model 4520, S/N 24232, 200MM, CE Marked, Very Clean System! Wafer Clamping, Backside Helium, Endpoint Detection. Ergonomic Cassette Load/Upload, Hine 38A Indexers, Upgraded wafer edge sensor, Orbital welded 8 process gas box with Tylan 2900 MFC's: CF4- 200 sccm, CF4- 50 sccm, CHF3- 200 sccm, N2- 100 sccm, AR- 500 sccm, N2- 100 sccm, AR- 500 sccm, CHF3- 200 sccm. Unit 1300 N2-50 sccm for backside cooling. Lofat tuning network. Includes remote RF Cart with AE PDW-2200, cables, Lam 2080 Dual Channel chiller, Classic Software. Pumps and process kit are not included. We'll ship Worldwide. Pickup only. All crating and shipping to be paid the buyer. It's hooked up and ready for inspection. If you have any questions, please call logan Technologies, LP (254) 773-4070     Place a Bid!